منابع مشابه
Plasma anodization of silicon at room temperature
2014 Room temperature plasma anodization of silicon (growth rate of a few nm/min.) is possible through a thin calcia stabilized zirconia (CSZ) layer. The anodization kinetics, the composition and the electrical properties of the anodic SiO2 films are studied. Constant voltage or low current anodization lead to quasi defect free films with reduced surface roughness. The dielectric breakdown fiel...
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Plasma-assisted oxidation, anodization, and nitridation of silicon have been performed in microwave, rf, and dc plasmas with a variety of reactor configurations and a range of plasma densities. Compared to thermal processes at equivalent substrate temperatures, film growth rates are accelerated by the plasma-enhanced generation of reactive chemical species or by the presence of electric fields ...
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The study of pulsed laser- and microwave-induced plasma interactions with atmospheric and higher pressure combusting gases requires rapid diagnostic methods that are capable of determining the mechanisms by which these interactions are taking place. New rapid diagnostics are presented here extending the capabilities of Rayleigh and Thomson scattering and resonance-enhanced multi-photon ionizati...
متن کاملAnalysis of solids by laser ablation and resonance-enhanced laser-induced plasma spectroscopy
An analytical technique based on resonance-enhanced laser-induced plasma spectroscopy was demonstrated. Pellets of potassium iodate containing trace amounts of sodium were ablated by a 532-nm laser pulse in air. After 30 ns, the plasma plume was intercepted by a 404.4-nm laser pulse to resonantly photoionize the potassium atoms in the vapor plume. The 589-nm emissions of the sodium were found t...
متن کامل1. Aluminum anodization
The history of electrochemical oxidation of aluminum dates back to the beginning of the last century. Anodic treatment of aluminum were intensively investigated to obtain protective and decorative films on its surface [1]. More recently, applications of porous alumina with a huge surface area and a relatively narrow pore size distribution have been exploited [2]. For example, several attempts t...
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ژورنال
عنوان ژورنال: Hyomen Kagaku
سال: 1989
ISSN: 0388-5321,1881-4743
DOI: 10.1380/jsssj.10.335